NDLI: Enhanced large signal performance of PZT thick film actuators for active micro-optics

Content Provider	IEEE Xplore Digital Library
Author	Ernst, D. Bramlage, B. Gebhardt, S. Schonecker, A. Pabst, O. Schreiner, H.-J.
Copyright Year	2013
Description	Author affiliation: Abbe Center of Photonics, Friedrich-Schiller-Univ. Jena, Jena, Germany (Pabst, O.) \|\| Multifunctional Ceramics, CeramTec GmbH, Lauf, Germany (Schreiner, H.-J.) \|\| Fraunhofer Inst. for Ceramic Technol. & Syst. (IKTS), Dresden, Germany (Ernst, D.; Bramlage, B.; Gebhardt, S.; Schonecker, A.)
Abstract	Screen-printed lead zirconate titanate (PZT) thick film actuators are beneficial for miniaturized devices due to their flat profile and accurate net-shaped fabrication. Sintering progress and piezoelectric performance depend on the type and amount of sintering additive. Cantilever structures were fabricated by the use of screen printing technology with a systematic variation of the sintering additive content and for two different piezoceramic base materials. Their microstructure, small and large signal properties were characterized. Based on the experimental data we developed an actuator frame to lift a micro-lens array within a low-profile microscope by 115 μm.
Sponsorship	IEEE Ultrasonics Ferroelectr. Freq. Control Soc.
Starting Page	5
Ending Page	8
File Size	1534657
Page Count	4
File Format	PDF
ISBN	9781467359962
DOI	10.1109/ISAF.2013.6748714
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-07-21
Publisher Place	Czech Republic
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Films Actuators Fabrication Substrates Displacement measurement Cantilever PZT Thick Film Screen Printing Actuator
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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