NDLI: Deposition of Diamond-Like Carbon Films on Inner Wall Surfaces of Millimeter-Size-Diameter Steel Tubes by Plasma Source Ion Implantation

Content Provider	IEEE Xplore Digital Library
Author	Baba, K. Hatada, R. Flege, S. Ensinger, W.
Copyright Year	1973
Abstract	Diamond-like carbon (DLC) film deposition on the interior surfaces of steel tubes was carried out by plasma source ion implantation. SUS304 austenitic-type stainless steel tubes with inner diameters of 9, 5, and 4 mm were used as substrate tubes. Acetylene was the working gas for the plasma that was generated by applying a negative pulse voltage of -18 kV to the substrates. The surface morphology of the films and the film thickness were observed by atomic force microscopy and scanning electron microscopy. The composition within the film and at the interface was examined by depth profiling with Auger electron spectroscopy and secondary ion mass spectrometry. The film structure was characterized by Raman spectroscopy. The friction coefficient of the untreated substrate and the DLC films was evaluated by a reciprocating sliding test. The DLC film surfaces were smooth, and no special structure was observed on the surface. The DLC film thicknesses, structure, and composition on the interior surface of the steel tube depend, on the one hand, on the gas and pulse conditions and, on the other hand, on the distance from the end of the tube, as well as on the diameter of the tube. A low friction coefficient of 0.2 was derived for the deposited DLC films.
Sponsorship	IEEE Nuclear and Plasma Sciences Society
Starting Page	3140
Ending Page	3143
Page Count	4
File Size	524105
File Format	PDF
ISSN	00933813
Volume Number	39
Issue Number	11
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-11-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electron tubes Surface treatment Ion implantation Plasmas Substrates Surface morphology Steel tube Diamond-like carbon (DLC) plasma source ion implantation (PSII)
Content Type	Text
Resource Type	Article
Subject	Nuclear and High Energy Physics Condensed Matter Physics

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