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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yiwen Zhang Ohnuma, S. Masumoto, H. |
| Copyright Year | 1965 |
| Abstract | The effect of Co content on the magnetic properties has been systematically investigated, to obtain high frequency soft magnetic Cox-(TiN)1-x films. The films with Co content more than 73 at.% are perpendicular magnetic, and the films with Co content less than 45 at.% are both soft and super-para magnetic. In a wide-range of Co content (x=45-73 at.%), the Cox-(TiN)1-x nanogranular films show good soft magnetic properties, with coercivity as low as 4 Oe and magnetization around 6-12 kG. The permeability of the films is as high as about 400 and the resonance frequency is around 1 GHz. The films exhibit good thermal stability with the low coercivity of about 5 Oe even after the annealing at 500°C, which is very important in viewpoint of application like a CMOS-compatible fabrication technology. |
| Sponsorship | IEEE Magnetics Society |
| Starting Page | 3795 |
| Ending Page | 3798 |
| Page Count | 4 |
| File Size | 619584 |
| File Format | |
| ISSN | 00189464 |
| Volume Number | 47 |
| Issue Number | 10 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2011-10-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Soft magnetic materials Magnetic properties Thermal stability Perpendicular magnetic anisotropy Magnetic resonance Saturation magnetization TiN matrix Co-based films gigahertz frequency high permeability soft magnetic materials thermal stability |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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