NDLI: Acoustic wave flow sensor using quartz thickness shear mode resonator

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IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control - Front cover

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Introduction to the special issue on electroceramics

Influence of composition and pressure on the electric field-induced antiferroelectric to ferroelectric phase transformation in lanthanum modified lead zirconate titanate ceramics

Effect of nickel-niobium co-doping on structural, electromechanical, and dielectric properties of lead titanate ceramics

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Poled composites with Nd-Mn-doped PZTfibers under bipolar electrical load

Large-scale fabrication of titanium-rich perovskite PZT submicro/nano wires and their electromechanical properties

A high temperature piezoelectric ceramic: (1-x)(Bi_0.9La_0.1)FeO_3-xPbTiO₃ crystalline solutions

Effects of gallium on the structure and electrical properties of 0.65 Bi_0.94La_0.06) (Ga_xFe_1-x)O₃-0.35PbTiO₃ ceramics

Dielectric investigations of 0.945(Bi_0.5Na_0.5) TiO₃-0.055BaTiO₃

Piezoceramics properties as a function of the structure in the system (K,Na,Li)(Nb,Ta,Sb)O₃

Lattice dynamics and phase transitions in KNbO₃ and K_0.5Na_0.5NbO₃ ceramics

Radiation of x-rays using polarized LiNbO₃ single crystal in low-pressure ambient gas

Graphics processing unit-based high-frame-rate color doppler ultrasound processing

Capacitance of thin-film ferroelectrics under different drive signals

Benefits of minimum-variance beamforming in medical ultrasound imaging

Precise time-of-flight calculation for 3-D synthetic aperture focusing

A post-beamforming 2-D pseudoinverse filter for coarsely sampled ultrasound arrays

Fast computation of the acoustic field for ultrasound elements

Ultrasound transducer and system for real-time simultaneous therapy and diagnosis for noninvasive surgery of prostate tissue

Minimum variance beamforming combined with adaptive coherence weighting applied to medical ultrasound imaging

Ultrasonic imaging algorithms with limited transmission cycles for rapid nondestructive evaluation

Acoustic wave flow sensor using quartz thickness shear mode resonator

Determination of epoxy film parameters in a three-layer metal/adhesive/metal structure

Attenuation of lamb waves in the vicinity of a forbidden band in a phononic crystal

Silicon-based megahertz ultrasonic nozzles for production of monodisperse micrometer-sized droplets

Variational principles for polar piezoelectric media in elastic range

Analysis of multifrequency langevin composite ultrasonic transducers

Flexible ultrasonic transducers incorporating piezoelectric fibres

Power harvesting using PZT ceramics embedded in orthopedic implants

Size optimization of a piezoelectric actuator on a clamped elastic plate

Inverse problem for the geometry profile determination of waveguides with varying section using adiabatic behavior of guided waves

Linear unbiased prediction of clock errors

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Acoustic wave flow sensor using quartz thickness shear mode resonator

Content Provider	IEEE Xplore Digital Library
Author	Lifeng Qin Zijing Zeng Hongbin Cheng Qing-ming Wang
Copyright Year	1986
Abstract	A quartz thickness shear mode (TSM) bulk acoustic wave resonator was used for in situ and real-time detection of liquid flow rate in this study. A special flow chamber made of 2 parallel acrylic plates was designed for flow measurement. The flow chamber has a rectangular flow channel, 2 flow reservoirs for stabilizing the fluid flow, a sensor mounting port for resonator holding, one inlet port, and one outlet port for pipe connection. A 5-MHz TSM quartz resonator was edge-bonded to the sensor mounting port with one side exposed to the flowing liquid and other side exposed to air. The electrical impedance spectra of the quartz resonator at different volumetric flow rate conditions were measured by an impedance analyzer for the extraction of the resonant frequency through a data-fitting method. The fundamental, 3rd, 5th, 7th, and 9th resonant frequency shifts were found to be around 920, 3572, 5947, 8228, and 10 300 Hz for flow rate variation from 0 to 3000 mL/min, which had a corresponding Reynolds number change from 0 to 822. The resonant frequency shifts of different modes are found to be quadratic with flow rate, which is attributed to the nonlinear effect of quartz resonator due to the effective normal pressure imposing on the resonator sensor by the flowing fluid. The results indicate that quartz TSM resonators can be used for flow sensors with characteristics of simplicity, fast response, and good repeatability.
File Size	1205893
File Format	PDF
ISSN	08853010
Volume Number	56
Issue Number	9
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-09-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Acoustic waves Acoustic sensors Resonant frequency Fluid flow Fluid flow measurement Impedance Sensor phenomena and characterization Acoustic signal detection Acoustic measurements Reservoirs
Content Type	Text
Resource Type	Article
Subject	Acoustics and Ultrasonics Instrumentation Electrical and Electronic Engineering

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