NDLI: Numerical Simulation of Metal Plasma Immersion Ion Implantation and Deposition on a Dielectric Wedge

Content Provider	IEEE Xplore Digital Library
Author	Dixon Tat-Kun Kwok
Copyright Year	1973
Abstract	Plasma immersion ion implantation (PIII) of a dielectric object is not straightforward to simulate because the surface will be charged during the process. The one-dimensional analytic equation developed by Emmert [J. Vac. Sci. Technol. B Microelectron. Process. Phenom., vol. 12, pp. 880, 1994] cannot be applied to a two-three-dimensional dielectric object. In this paper, the author develops a numerical model that can handle the surface charging effect of a complex dielectric object. The model is used to simulate the metal PIII and deposition of a dielectric wedge. The potential of the internal volume of the wedge is solved by Laplace's equation, the boundary between the wedge and metal plasma is handled by Gauss' law, and the bulk metal plasma region is simulated by the hybrid model of particle-in-cell ions and Boltzmann distribution of electrons. It shows that the equilibrium steady-state ion sheath formed by the sample stage biased at -8 kV is modified by the thinner dielectric wedge with the height of 0.03 m. The tip of the dielectric wedge is touched by the main stream of the metal plasma
Sponsorship	IEEE Nuclear and Plasma Sciences Society
Starting Page	1059
Ending Page	1065
Page Count	7
File Size	639205
File Format	PDF
ISSN	00933813
Volume Number	34
Issue Number	4
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-08-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Numerical simulation Plasma immersion ion implantation Dielectrics Plasma simulation Plasma sheaths Surface charging Numerical models Laplace equations Gaussian distribution Boltzmann distribution plasma immersion ion implantation Cathodic arc deposition dielectric substance particle-in-cell simulations
Content Type	Text
Resource Type	Article
Subject	Nuclear and High Energy Physics Condensed Matter Physics

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