NDLI: Deposition of rust proof Iron thin films with soft magnetic properties by dual ion beam sputtering

Content Provider	IEEE Xplore Digital Library
Author	Naoe, M. Yamaga, M. Terada, N.
Copyright Year	1965
Abstract	Iron thin films with soft magnetic properties have been deposited by Dual Ion Beam Sputtering. And the dependence of their crystal structure and magnetic properties on preparation conditions, especially on ion bombardment onto film surface during deposition, has been investigated. All films are composed fine crystallites of which size and magnetic ordering depend significantly on the kinetic energy of the bombarding ions. On the condition of bombarding ion energy around 115 eV, saturation magnetization 4πMs takes the maximum of 21 kG, and coercive force Hc takes the minimum about 1 Oe. These results indicate that the bombardment of argon ions with proper energy results in an improvement of atomic ordering and macro-structural uniformity in the films. Electrical resistivity ρ also depends on the ion energy ρ of the films with high 4πMs and low Hc is rather high about 40 μΩcm. Such films have excellent surface smoothness and no detectable structural ununiformity. Besides, they do not rust even by being put in saturated water vapor and dipped in water for more than one month.
Sponsorship	IEEE Magnetics Society
Starting Page	1900
Ending Page	1902
Page Count	3
File Size	453999
File Format	PDF
ISSN	00189464
Volume Number	21
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1985-09-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Sputtering Iron Magnetic films Magnetic properties Ion beams Crystallization Saturation magnetization Soft magnetic materials Kinetic energy Coercive force
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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