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Content Provider | IEEE Xplore Digital Library |
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Author | Tago, A. Nishimura, C. Yanagisawa, K. |
Copyright Year | 1965 |
Abstract | In this paper, the optimum deposition conditions of amorphous Co-Zr films fabricated by ion beam sputtering and their magnetic properties are investigated. The amorphous state is achieved at a low Zr content ( near 5 - 10 at% ) and is dependent on the substrate temperature. Co-Zr alloy films with a Zr content of 4.5 at% become amorphous on a -130 °C substrate, whereas a Zr content of more than 6 at% is necessary to obtain amorphous films on a 40 °C substrate. The resistivity of the films increases monotonically with Zr content or as the substrate temperature decreases from +300 °C to -130 °C. It is shown that the addition of a small amount of Re to the films decreases magnetostriction, although it lowers saturation magnetization slightly. A magnetostriction value of less than 10-7is obtained when 2 to 3 at%Re is added to the Co-Zr films with a 6 to 8 at%Zr. Ion beam sputtered Co-6 at %Zr-2at% Re in 1 to 3 μm thick amorphous films exhibits the following excellent properties: a saturation magnetization of more than 13 kG, a permeability at 10 MHz of more than 5000, and a Vickers hardness of over 700. |
Sponsorship | IEEE Magnetics Society |
Starting Page | 2032 |
Ending Page | 2034 |
Page Count | 3 |
File Size | 295033 |
File Format | |
ISSN | 00189464 |
Volume Number | 21 |
Issue Number | 5 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 1985-09-01 |
Publisher Place | U.S.A. |
Access Restriction | One Nation One Subscription (ONOS) |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Magnetic properties Ion beams Amorphous materials Magnetic films Zirconium Magnetostriction Saturation magnetization Sputtering Temperature dependence Conductivity |
Content Type | Text |
Resource Type | Article |
Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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