NDLI: A Low-Voltage CMOS-Microelectromechanical Systems Thermal-Piezoresistive Resonator With <inline-formula> <tex-math notation=LaTeX>$Q

Content Provider	IEEE Xplore Digital Library
Author	Cheng-Syun Li Ming-Huang Li Cheng-Chi Chen Chi-Hang Chin Sheng-Shian Li
Copyright Year	1980
Abstract	We report a thermally driven and piezoresistively sensed CMOS-microelectromechanical systems (MEMS) resonator with quality factor Q >10000 and stopband rejection of 15 dB under CMOS-compatible bias voltage. The bias voltage requirement of this letter is two orders of magnitude lower than that of the previous CMOS-MEMS capacitively transduced resonators. In addition, the combination of the bulkmode resonator design and highQ SiO2/polysilicon structural material leads to resonator Q >10000, a key index for low-phasenoise oscillators and low-insertion-loss filters. The resonator with a center frequency at 5.1 MHz was fabricated using a standard 0.35 μm 2-poly-4-metal CMOS process, featuring low cost, batch production, fast turnaround time, easy prototyping, and MEMS/IC integration. To resolve the feedthrough issue often seen in conventional thermal-piezoresistive resonators: 1) separation of the heater and piezoresistor is first adopted because of the routing flexibility of the structural configuration offered by CMOS back-end-of-line materials and 2) fully differential measurement scheme is then applied to the proposed device, both of which enable a low-feedthrough level with 65-dB improvement as compared with its single-ended counterpart.
Sponsorship	IEEE Electron Devices Society
Starting Page	192
Ending Page	194
Page Count	3
File Size	1315166
File Format	PDF
ISSN	07413106
Volume Number	36
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Heating Thermal stability Materials CMOS integrated circuits Micromechanical devices Thermal resistance Piezoresistance Micro-electro-mechanical System CMOS-MEMS Micro-resonators Piezoresistive device Thermal stability Q factor Thermo-elasticity microelectromechanical system micro-resonators piezoresistive device thermal stability $Q$ factor thermo-elasticity
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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