NDLI: Microwave MEMS Antenna Sensor Characterization and Target Detection Using Artificial Neural Networks

Content Provider	IEEE Xplore Digital Library
Author	Hutchings, D.A. El-Shenawee, M.
Copyright Year	2001
Abstract	This paper demonstrates microwave antenna sensors fabricated on a silicon micro electro-mechanical-system (MEMS) platform. The antennas are designed to operate between 10-16 GHz with 41% bandwidth and 50 Ω input impedance. Each antenna sensor is comprised of two planar metallic four point leaves in horizontal and vertical directions providing dual linear polarization. The design is simulated using the Ansoft high frequency structure simulator. The antennas are fed using coplanar waveguide routed on top of 100 μm width silicon hinges. The fabricated MEMS platform show maximum rotation of 9.14° (total range of 18.28°) around two axes using four torsion hinges. The results highlight the limitation of silicon as hinge material when larger angles are desired. The antenna sensors demonstrate good detection of targets using measured scattered data and the artificial neural networks technique.
Sponsorship	IEEE Sensors Council
Starting Page	2461
Ending Page	2468
Page Count	8
File Size	1204778
File Format	PDF
ISSN	1530437X
Volume Number	14
Issue Number	8
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Antenna measurements Micromechanical devices Fasteners Broadband antennas Coplanar waveguides Arrays artificial neural networks MEMS platform broadband dual polarization bulk microfabrication planar antennas
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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