NDLI: Molecular Electronic Transducer-Based Low-Frequency Accelerometer Fabricated With Post-CMOS Compatible Process Using Droplet as Sensing Body

Content Provider	IEEE Xplore Digital Library
Author	Hai Huang Mengbing Liang Rui Tang Oiler, J. Hongyu Yu
Copyright Year	1980
Abstract	This letter reports a low-frequency micro-accelerometer implementing a liquid-state sensing body, based on molecular electronic transducer (MET) in post-CMOS compatible microfabrication technology. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body, and a MET electrode configuration as the sensing read-out mechanism. The promising and unique performance of the MET design allows the fabricated device to achieve 10.8 V/G(G=9.81 m/s²) sensitivity at 20 Hz with nearly flat response over the frequency range from 1 to 50 Hz, and a low noise floor of 75 μG/√(Hz) at 20 Hz.
Sponsorship	IEEE Electron Devices Society
Starting Page	1304
Ending Page	1306
Page Count	3
File Size	644093
File Format	PDF
ISSN	07413106
Volume Number	34
Issue Number	10
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-10-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Sensors Accelerometers Electrodes Sensitivity Micromechanical devices Fabrication Acceleration post-CMOS compatible Accelerometer electrolyte droplet microelectromechanical systems (MEMS) molecular electronic transducer
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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