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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Kiyeong Kim Chulsoon Hwang Kyoungchoul Koo Jonghyun Cho Heegon Kim Joungho Kim Junho Lee Hyung-Dong Lee Kun-Woo Park Jun So Pak |
| Copyright Year | 2011 |
| Abstract | In this paper, we propose a model for 3-D stacked on-chip power distribution networks (PDNs) in through silicon via (TSV)-based 3-D memory ICs that includes the effects of power/ground TSVs (P/G TSVs), on-chip decoupling capacitors (on-chip decaps), and the silicon substrate. In the modeling procedure of 3-D stacked on-chip PDNs, the distributed RLGC-lumped model of an on-chip PDN, including the effects of the on-chip decaps and silicon substrate, is proposed. Additionally, the RLGC-lumped model of a P/G TSV pair is introduced. The proposed model of the 3-D stacked on-chip PDN combines the proposed models of on-chip PDNs with the models of P/G TSV pairs in a hierarchical order with a segmentation method. The proposed models of the on-chip PDN and 3-D stacked on-chip PDN are successfully validated by simulations and measurements up to 20 GHz. Additionally, with these models, the impedances of the 3-D stacked on-chip PDNs are analyzed with respect to the variations in the number of P/G TSV pairs, the capacitance of on-chip decaps, and the height of an interlayer dielectric layer between the on-chip PDN and silicon substrate. These variations critically affect the impedance of the 3-D stacked on-chip PDN by changing the capacitance and inductance of the PDN. |
| Starting Page | 2057 |
| Ending Page | 2070 |
| Page Count | 14 |
| File Size | 2634128 |
| File Format | |
| ISSN | 21563950 |
| Volume Number | 2 |
| Issue Number | 12 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2012-12-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | System-on-a-chip Silicon Substrates Impedance Through-silicon vias through silicon via (TSV)-based 3-D ICs 3-D stacked on-chip power distribution network (PDN) on-chip decoupling capacitor (decap) on-chip PDN PDN impedance power/ground (P/G) TSV silicon substrate |
| Content Type | Text |
| Resource Type | Article |
| Subject | Industrial and Manufacturing Engineering Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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