NDLI: <emphasis emphasistype=italic>In Situ</emphasis> Electron Microscopy Mechanical Testing of Silicon Nanowires Using Electrostatically Actuated Tensile Stages

Content Provider	IEEE Xplore Digital Library
Author	Dongfeng Zhang Breguet, J.-M. Clavel, R. Sivakov, V. Christiansen, S. Michler, J.
Copyright Year	1992
Abstract	Two types of electrostatically actuated tensile stages for in situ electron microscopy mechanical testing of 1-D nanostructures were designed, microfabricated, and tested. Testing was carried out for mechanical characterization of silicon nanowires (SiNWs). The bulk micromachined stages consist of a comb-drive actuator and either a differential capacitive sensor or a clamped-clamped beam force sensor. High-aspect-ratio structures (height/gap = 20) were designed to increase the driving force of the geometrically optimized actuator and the sensitivity of the capacitive sensor. The actuator stiffness is kept low to enable high tensile force to be exerted in the specimen rather than in the suspensions of the comb drive. Individual SiNWs were mounted on the devices by in situ scanning electron microscopy nanomanipulation, and their tensile properties were determined to demonstrate the device capability. The phosphorus-doped SiNWs, which were grown in a bottom-up manner by the vapor-liquid-solid process, show an average Young's modulus of (170.0 ± 2.4) GPa and a tensile strength of at least 4.2 GPa. Top-down electroless chemically etched SiNWs, with their long axis along the [100] direction, show a fracture strength of 5.4 GPa.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	663
Ending Page	674
Page Count	12
File Size	931205
File Format	PDF
ISSN	10577157
Volume Number	19
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Testing Actuators Force sensors Capacitive sensors Electron microscopy Nanostructures Silicon Nanowires Design optimization Suspensions tensile test Capacitive sensor comb drive nanomechanics silicon nanowire (SiNW)
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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