NDLI: Design and Operation of a MEMS-Based Material Testing System for Nanomechanical Characterization

Content Provider	IEEE Xplore Digital Library
Author	Espinosa, H.D. Yong Zhu Moldovan, N.
Copyright Year	1992
Abstract	In situ mechanical characterization of nanostructures, such as carbon nanotubes and metallic nanowires, in scanning and transmission electron microscopes is essential for the understanding of material behavior at the nanoscale. This paper describes the design, fabrication, and operation of a novel microelectromechanical-systems (MEMS)-based material testing system used for in situ tensile testing of nanostructures. The device consists of an actuator and a load sensor with a specimen in between. Two types of actuators, in-plane thermal and comb drive actuators, are used to pull the specimens in displacement control and force control modes, respectively. The load sensor works based on differential capacitive sensing, from which the sensor displacement is recorded. By determining sensor stiffness from mechanical resonance measurements, the load on the specimen is obtained. Load sensors with different stiffness were fabricated. The best resolutions were achieved with load sensors that are designed for testing nanotubes, reaching 0.05 fF in capacitance, 1 nm in displacement, and 12 nN in load. For the first time, this MEMS-based material testing scheme offers the possibility of continuous observation of the specimen deformation and fracture with subnanometer resolution, while simultaneously measuring the applied load electronically with nano-Newton resolution. The overall device performance is demonstrated by testing freestanding cofabricated polysilicon films and multiwalled carbon nanotubes.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1219
Ending Page	1231
Page Count	13
File Size	1370634
File Format	PDF
ISSN	10577157
Volume Number	16
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-10-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Materials testing Mechanical sensors Actuators Capacitive sensors Nanostructures Carbon nanotubes Nanowires Scanning electron microscopy Transmission electron microscopy Inorganic materials nanowires Capacitive sensing carbon nanotubes in situ microscopy load sensor nanomechanics nanostructure
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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