NDLI: A Novel MEMS Respiratory Flow Sensor

Content Provider	IEEE Xplore Digital Library
Author	Chia-Ling Wei Chien-Fu Lin I-Ta Tseng
Copyright Year	2001
Abstract	A novel CMOS-process-compatible MEMS sensor for monitoring respiration is presented. This resistive flow sensor was manufactured by the TSMC 0.35 ¿m CMOS/MEMS mixed-signal 2P4M polycide process. The sensor was demonstrated to be sensitive enough to detect the respiratory flow rate, and the relationship between flow rate and sensed voltage is quite linear. If one can integrate the sensor with its sensing circuit into a single chip, the cost of a pneumotach system can be greatly reduced. Moreover, the proposed sensor is useful in both invasive and noninvasive applications.
Sponsorship	IEEE Sensors Council
Starting Page	16
Ending Page	18
Page Count	3
File Size	450769
File Format	PDF
ISSN	1530437X
Volume Number	10
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Impedance measurement Manufacturing processes CMOS process Patient monitoring Temperature sensors Sensor systems Circuits Costs Force sensors respiratory monitoring CMOS/MEMS flow sensor
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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A Novel MEMS Respiratory Flow Sensor