NDLI: A CMOS Micromachined Capacitive Tactile Sensor With High-Frequency Output

Content Provider	IEEE Xplore Digital Library
Author	Cheng-Ting Ko Sheng-Hsiang Tseng Lu, M.S.-C.
Copyright Year	1992
Abstract	This paper describes the design and characterization of a CMOS-micromachined tactile sensing device that can be utilized for fingerprint recognition. The complete post micromachining steps are performed at die level without resorting to a wafer-level process, providing a low-cost solution for production. The micromechanical structure has an area of 200 mum by 200 mum and an initial sensing capacitance of 153 fF. An oscillator circuit is used to convert the pressure induced capacitance change to a shift in output frequency. The circuit has a measured initial frequency at 49.5 MHz under no applied force. The total frequency shift is 14 MHz with a corresponding mechanical displacement of 0.56 mum and a capacitance change of 63 fF, averaging a capacitive sensitivity of 222 kHz/fF. The measured spring constant is 923N/m, producing a force sensitivity of 27.1 kHz/muN
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1708
Ending Page	1714
Page Count	7
File Size	1138764
File Format	PDF
ISSN	10577157
Volume Number	15
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Tactile sensors Force measurement Capacitance Circuits Frequency Fingerprint recognition Micromachining Production Micromechanical devices Oscillators complementary–metal–oxide semiconductor (CMOS) microelectromechanical systems (MEMS) Astable oscillator capacitive sensor
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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