NDLI: An Integration Technology for RF and Microwave Circuits Based on Interconnect Programming

Content Provider	IEEE Xplore Digital Library
Author	Rabieirad, L. Martinez, E.J. Mohammadi, S.
Copyright Year	1999
Abstract	A configurable integration technology suitable for implementing application specific radio-frequency (RF) and microwave circuits is presented. This postfabrication integration scheme is compatible with complementary metal-oxide-semiconductor (CMOS) technology and utilizes room temperature deposited Parylene-N as low loss and low permittivity dielectric material. Interconnect lines, inductors, and transmission lines fabricated on top of arrays of prefabricated 0.13 ¿m and 90 nm CMOS transistors coated with Parylene-N are configured to design interconnect programmable RF and microwave circuits. The technology is used to demonstrate three proof of concept interconnect programmable narrowband amplifiers. These amplifiers have center frequencies of 5.5, 6.4, and 18 GHz with forward gain S₂₁ of 16.6, 11, and 18.7 dB, respectively. Fabrication simplicity and programmable nature of this technology compared to standard application specific integrated circuit (ASIC) fabrication lowers the cost and time to market of individual ASIC chip.
Sponsorship	IEEE Components, Packaging, and Manufacturing Technology Society IEEE Components, Packaging and Manufacturing Technology Society
Starting Page	362
Ending Page	369
Page Count	8
File Size	1034938
File Format	PDF
ISSN	15213323
Volume Number	33
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-05-01
Publisher Place	U.S.A.
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microwave technology Radio frequency Microwave circuits Integrated circuit interconnections CMOS technology Application specific integrated circuits Radiofrequency amplifiers Fabrication Temperature Dielectric losses radio frequency (RF) Coplanar waveguide (CPW) transmission line inductor interconnect low-k dielectric material narrowband amplifiers Parylene-N programmable circuits
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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