NDLI: Reducing Anchor Loss in MEMS Resonators Using Mesa Isolation

Content Provider	IEEE Xplore Digital Library
Author	Pandey, M. Reichenbach, R.B. Zehnder, A.T. Lal, A. Craighead, H.G.
Copyright Year	1992
Abstract	In microelectromechanical systems resonators, dissipation of energy through anchor points into the substrate adds to resonator energy loss, contributing to low values of Q. A design for improving Q based on the reflection of anchor-generated surface acoustic waves is presented here. In this design, the resonator is surrounded by a trench, or a mesa, that partially reflects the wave energy back to the resonator. Depending on the distance from the resonator to the mesa, the reflected wave interferes either constructively or destructively with the resonator, increasing or decreasing Q. The proposed design is experimentally tested using a dome-shaped flexural mode resonator for a range of distances of the mesa from the resonator. Improvements in Q of up to 400% are observed. The resonator/mesa system is modeled using a commercially available finite-element code. Experiments and simulations compare well, suggesting that a finite-element-method analysis can be used in the preliminary design of mesas for the optimization of Q. The concept of using mesas to improve Q is simulated for both flexural and in-plane modes of vibration.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	836
Ending Page	844
Page Count	9
File Size	960362
File Format	PDF
ISSN	10577157
Volume Number	18
Issue Number	4
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-08-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Finite element methods Microelectromechanical systems Energy loss Acoustic reflection Surface acoustic waves Acoustic waves Testing Analytical models Design optimization surface acoustic waves Feedback systems finite-element methods isolation technology optical parametric amplifiers $Q$ -factor
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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