NDLI: Profile Control in Silicon Nanostructures Using Fluorine-Enhanced Oxide Passivation

Content Provider	IEEE Xplore Digital Library
Author	Yi Zhao Xin Zhang
Copyright Year	2002
Abstract	Nanostructures with controllable geometries are increasingly needed for mechanosensor applications due to their superior capabilities in measuring minute mechanical forces at small scales. Previous nanofabrication technologies are deficient in creating such structures due to high cost, complicated process and poor geometric control. In this paper, we introduce an innovative use of fluorine enhanced oxidation to realize a segment by segment sidewall control strategy for creating silicon nanostructures. This method is based on fluorine reactive ion etching, where the rich amount of fluorine species accumulated on the surface are utilized to enhance surface oxidation during an additional oxygen exposure. The experimental results showed good repeatability. The characteristic feature size of the resulting nanostructures is about 200 nm. The minimum feature size goes down to 50 nm. This method requires minimal use of equipment, and demonstrates good control of sidewall profiles. It thus has technical and economic significance in development of functional nanomechanosensors, which are potent for quantitative mechanical sensing and actuating at small scales.
Sponsorship	IEEE Nanotechnology Council
Starting Page	40
Ending Page	47
Page Count	8
File Size	800588
File Format	PDF
ISSN	1536125X
Volume Number	7
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Nanostructures Passivation Oxidation Force control Geometry Mechanical variables measurement Force measurement Nanofabrication Costs passivation Nanomanufacturing nanomechanosensing reactive ion etching silicon nanostructures nanomanufacturing nano-mechanosensing
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Electrical and Electronic Engineering Computer Science Applications

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