NDLI: Characterization of Integrated Tin Oxide Gas Sensors With Metal Additives and Ion Implantations

Content Provider	IEEE Xplore Digital Library
Author	Bin Guo Bermak, A. Chan, P. Gui-Zhen Yan
Copyright Year	2001
Abstract	Post-treatment of the sensing film in tin oxide gas sensor arrays is widely used to improve the selectivity in gas recognition applications. This letter describes the characterization study of an integrated tin oxide gas sensor array chip in which the sensing films are modified using metal additives and ion implantations. Measurement results reveal that metal additives present a higher impact on the sensor sensitivity compared with ion implantations. The latter has no significant effect on the sensing properties. The drift is increased for the sensors with only ion implantation compared with the ones with metal additives. An array combining both post-treatment techniques is expected to improve the overall recognition performance.
Sponsorship	IEEE Sensors Council
Starting Page	1397
Ending Page	1398
Page Count	2
File Size	129937
File Format	PDF
ISSN	1530437X
Volume Number	8
Issue Number	8
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-08-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Tin Gas detectors Ion implantation Sensor arrays Additives CMOS technology Electrodes Thermal sensors Semiconductor device measurement Sensor phenomena and characterization tin oxide Array drift post-treatment
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

A CMOS Single-Chip Gas Recognition Circuit for Metal Oxide Gas Sensor Arrays

An Integrated Surface Micromachined Convex Microhotplate Structure for Tin Oxide Gas Sensor Array

CMOS Sensor Arrays for High Resolution Die Stress Mapping in Packaged Integrated Circuits

Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array

CMOS Thermal Sensor Arrays for Enzymatic Glucose Detection

Gas identification with tin oxide sensor array and self-organizing maps: adaptive correction of sensor drifts

Electrooptical measurement system for the DC characterization of visible detectors for CMOS-compatible vision chips

A CMOS Integrable Oscillator-Based Front End for High-Dynamic-Range Resistive Sensors

CMOS DNA Sensor Array With Integrated A/D Conversion Based on Label-Free Capacitance Measurement

Characterization of Integrated Tin Oxide Gas Sensors With Metal Additives and Ion Implantations

Similar Documents

A CMOS Single-Chip Gas Recognition Circuit for Metal Oxide Gas Sensor Arrays

An Integrated Surface Micromachined Convex Microhotplate Structure for Tin Oxide Gas Sensor Array

CMOS Sensor Arrays for High Resolution Die Stress Mapping in Packaged Integrated Circuits

Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array

CMOS Thermal Sensor Arrays for Enzymatic Glucose Detection

Gas identification with tin oxide sensor array and self-organizing maps: adaptive correction of sensor drifts

Electrooptical measurement system for the DC characterization of visible detectors for CMOS-compatible vision chips

A CMOS Integrable Oscillator-Based Front End for High-Dynamic-Range Resistive Sensors

CMOS DNA Sensor Array With Integrated A/D Conversion Based on Label-Free Capacitance Measurement

Characterization of Integrated Tin Oxide Gas Sensors With Metal Additives and Ion Implantations