NDLI: Laser Micromachining of Barium Titanate <formula formulatype=inline> <tex>$({hbox {BaTiO}}_{3})$</tex></formula>-Epoxy Nanocomposite-Based Flexible/Rollable Capacitors: New Approach for Making Library of Capacitors

Content Provider	IEEE Xplore Digital Library
Author	Das, R.N. Egitto, F.D. Lauffer, J.M. Markovich, V.R.
Copyright Year	1999
Abstract	This paper discusses laser micromachining of barium titanate (BaTiO₃)-polymer nanocomposite thin films. In particular, recent developments on high-capacitance, large-area, thin, flexible, embedded capacitors are highlighted. A variety of barium titanate (BaTiO₃)-epoxy polymer nanocomposite-based flexible/rollable thin films ranging from 2 to 25 mum thick were processed on large-area substrates (330 mm times 470 mm, or 495 mm times 607 mm) by liquid coating processes. The electrical performance of composites was characterized by dielectric constant (Dk), capacitance, and dissipation factor (loss) measurements. Nanocomposites provided high capacitance density (10-100 nF/in²) and low loss (0.02-0.04) at 1 MHz. Scanning electron microscopy (SEM) micrographs showed uniform particle distribution in the coatings. Uniform mixing of nanoparticles in the epoxy matrix results in high dielectric (> 3 times 10⁷ V/m) and mechanical strengths (> 3700 PSI). Reliability of the capacitor was ascertained by thermal cycling. Capacitance change was less than 5% after baking at 140degC for 4 h, and 1100 cycles from -55degC to 125degC (deep thermal cycle). A frequency-tripled Nd:YAG laser operating at a wavelength of 355 nm was used for the micromachining study. The micromachining was used to generate arrays of variable-thickness capacitors from the nanocomposites. The resultant thickness of the capacitors depends on the number of laser pulses applied.
Sponsorship	IEEE Components, Packaging, and Manufacturing Technology Society International Microelectronics Assembly and Packaging Society (IMAPS)
Starting Page	97
Ending Page	103
Page Count	7
File Size	1665423
File Format	PDF
ISSN	1521334X
Volume Number	31
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-04-01
Publisher Place	U.S.A.
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromachining Barium Titanium compounds Capacitors Polymer films Capacitance Coatings Dielectric loss measurement Scanning electron microscopy Dielectric thin films polymer nanocomposite Barium titanate capacitor dielectric constant flexible laser micromachining
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Electrical and Electronic Engineering

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