NDLI: A Real Pivot Structure for MEMS Tunable Lasers

Content Provider	IEEE Xplore Digital Library
Author	Zhang, X.M. Liu, A.Q. Lu, C. Tang, D.Y.
Copyright Year	1992
Abstract	This paper presents the design of a real pivot formed by a double-clamped beam for the rotational tuning structures in microelectromechanical systems (MEMS) tunable lasers. Micromechanical properties such as beam deformation, pivot position and pivot shift are investigated and compared with the virtual pivot formed by a cantilever beam. It is shown that the real pivot has negligible shift when subjected to load and fabrication error owing to its feature of structural symmetry, while the virtual pivot suffers from significant pivot shift, which would severely limit the wavelength tuning range. The two pivot designs are implemented into MEMS tuning structures that are fabricated by deep etching and released using a dry release approach. The real pivot measures a depth variation of 16% over the double-clamped beam but maintains the symmetry to the midpoint, and is still able to produce a rotation angle of 4.7deg. In contrast, the virtual pivot has a depth reduction of 4% over the cantilever beam, but achieves only a 2.4deg rotation due to the pull-in problem originated from the severe pivot shift. The real pivot design is more suitable for the MEMS tunable lasers as it is simple, symmetric, robust, and suitable for single-chip integration
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	269
Ending Page	278
Page Count	10
File Size	2053457
File Format	PDF
ISSN	10577157
Volume Number	16
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-04-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Tunable circuits and devices Laser tuning Structural beams Optical design Laser beams Microelectromechanical systems Optical device fabrication Dry etching Rotation measurement rotary comb drive External-cavity tunable lasers microelectromechanical systems (MEMS) micromechanics pivot
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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