NDLI: Materials Selection and Design of<newline/> Microelectrothermal Bimaterial Actuators

Content Provider	IEEE Xplore Digital Library
Author	Prasanna, S. Spearing, S.M.
Copyright Year	1992
Abstract	A common form of MEMS actuator is a thermally actuated bimaterial, which is easy to fabricate by surface micromachining and permits out of plane actuation, which is otherwise difficult to achieve. This paper presents an analytical framework for the design of such microelectrothermal bimaterial actuators. Mechanics relationships for a cantilever bimaterial strip subjected to a uniform temperature were applied to obtain expressions for performance metrics for the actuator, i.e., maximum work/volume, blocked (force) moment, and free-end (displacement) slope. Results from finite-element analysis and closed form relations agree well to within 1%. The optimal performance for a given pair of materials and the corresponding thickness ratio were determined. Contours of equal performance corresponding to commonly used substrates (e.g., Si, SiO₂) were plotted in the domain of governing material properties (thermal expansion coefficient and Young's modulus) to identify candidate materials for further development. These results and the accompanying methodology provide a rational basis for comparing the suitability of "standard" materials for microelectrothermal actuators, as well as identifying materials that might be suitable for further research
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	248
Ending Page	259
Page Count	12
File Size	602887
File Format	PDF
ISSN	10577157
Volume Number	16
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-04-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Actuators Micromechanical devices Semiconductor materials Silicon Electrothermal effects Semiconductor films CMOS technology Thermal expansion Fabrication Thermal resistance performance and thermoelasticity Microactuators optimization
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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