NDLI: Side-Wall Vertical Electrodes for Lateral Field Microfluidic Applications

Content Provider	IEEE Xplore Digital Library
Author	Lisen Wang Flanagan, L. Lee, A.P.
Copyright Year	1992
Abstract	This paper describes the design, fabrication, and testing of microfluidic devices enabled by electrodes embedded vertically in the side walls of SU-8 microchannels. With vertical electrodes on the side walls, one can generate higher lateral electrical fields uniform along the vertical direction in the channel (perpendicular to the substrate). By designing the electrode shapes and configurations, uniform and nonuniform electrical fields in the lateral (planar) directions can be applied to manipulate flow or particles in microchannels for switching or sorting applications. The uniform field is demonstrated in a magnetohydrodynamic (MHD) microfluidic device for directing cells to different channel outlets while the nonuniform field is demonstrated in the generation of dielectrophoresis (DEP) forces for microbead focusing. Metal electrodes are fabricated by electroplating to form vertical electrodes aligned with the channel walls. The multilayer SU-8 lithography technique enables the four walls of the channel to be all SU-8. The thin precoated SU-8 layer on the substrate improves structure integrity of the SU-8 microchannels. The mechanical flexibility of PDMS compensates for the surface nonuniformity from the previous patterning steps to conformably cap the channel. The ability to integrate versatile electrodes design broadens the realm of electrical control and sensing for microfluidic applications
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	454
Ending Page	461
Page Count	8
File Size	2990548
File Format	PDF
ISSN	10577157
Volume Number	16
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-04-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrodes Microfluidics Microchannel Magnetohydrodynamic power generation Fabrication Testing Shape Sorting Dielectrophoresis Magnetic multilayers vertical electrodes Conformably bonding dielectrophoresis (DEP) electroplating flexible PDMS lateral manipulation magnetohydrodynmic (MHD) microfluidics multilayer SU-8 surface topology
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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