NDLI: Micromachined Vibratory Diffraction Grating Scanner for Multiwavelength Collinear Laser Scanning

Content Provider	IEEE Xplore Digital Library
Author	Guangya Zhou Fook Siong Chau
Copyright Year	1992
Abstract	This paper presents an effective method to achieve multiwavelength collinear laser scanning using micromachined vibratory grating scanners, which have the potential to scan at high frequencies without the optical performance degradation resulting from dynamic nonrigid-body deformation. An optical simulation model has been developed to predict the scanning patterns of the vibratory grating scanners. The proposed multiwavelength collinear scanning method was studied both analytically with the optical simulation model and experimentally with a prototype device fabricated by the MUMPS polysilicon surface micromachining process. The experimental results agree very well with the simulation data. The prototype scanner demonstrated collinear scanning of 532 nm (green) and 632.8 nm (red) wavelengths laser beams and achieved an optical scan angle of 12.7 degrees with virtually bow-free scan-line at a resonant frequency of 9.9 kHz when driven by electrostatic comb-drive resonators with 60 V dc bias and 32 V_pp ac voltages
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1777
Ending Page	1788
Page Count	12
File Size	2100108
File Format	PDF
ISSN	10577157
Volume Number	15
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Diffraction gratings Optical resonators Laser modes Predictive models Virtual prototyping Optical diffraction Frequency Degradation Optical devices Analytical models optical microelectromechanical systems (MEMS) Diffraction grating micromirrors microscanners
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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