NDLI: Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance

Content Provider	IEEE Xplore Digital Library
Author	Demirci, M.U. Nguyen, C.T.-C.
Copyright Year	1992
Abstract	Substantial reductions in vibrating micromechanical resonator series motional resistance R_x have been attained by mechanically coupling and exciting a parallel array of corner-coupled polysilicon square plate resonators. Using this technique with seven resonators, an effective R_x of 480 Omega has been attained at 70 MHz, which is more than 5.9X smaller than the 2.82 kOmega exhibited by a stand-alone transverse-mode corner-supported square resonator, and all this achieved while still maintaining an effective Q>9000. This method for R_x-reduction is superior to methods based on brute force scaling of electrode-to-resonator gaps or dc-bias increases, because it allows a reduction in R_x without sacrificing linearity, and thereby breaks the R_x versus dynamic range tradeoff often seen when scaling. This paper also compares two types of anchoring schemes for transverse-mode square micromechanical resonators and models the effect of support beam parameters on resonance frequency
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1419
Ending Page	1436
Page Count	18
File Size	3637934
File Format	PDF
ISSN	10577157
Volume Number	15
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microcavities Micromechanical devices Linearity Impedance Radio frequency Resonance Wireless communication Dynamic range Acoustic beams Resonant frequency square plate Array impedance mechanical coupling micromechanical resonator motional resistance quality factor resonator radio frequency (RF) microelectromechanical systems (MEMS)
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

High-Q UHF micromechanical radial-contour mode disk resonators

A Vertically Coupled MEMS Resonator Pair for Oscillator Applications

Towards Micromechanical Radio: Overtone Excitations of a Microresonator Through the Nonlinearities of the Second and Third Order

CMOS-Integrated RF MEMS Resonators

Realizing Deep-Submicron Gap Spacing for CMOS-MEMS Resonators

Remote RF powering system for wireless MEMS strain sensors

Hollow Square- and Ring-Plate MEMS Oscillators Embedded in a Phase-Locked Loop for Low Limit of Detection in Liquid

Third-order intermodulation in a micromechanical thermal mixer

Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance

Similar Documents

High-Q UHF micromechanical radial-contour mode disk resonators

A Vertically Coupled MEMS Resonator Pair for Oscillator Applications

Towards Micromechanical Radio: Overtone Excitations of a Microresonator Through the Nonlinearities of the Second and Third Order

CMOS-Integrated RF MEMS Resonators

Realizing Deep-Submicron Gap Spacing for CMOS-MEMS Resonators

Remote RF powering system for wireless MEMS strain sensors

Hollow Square- and Ring-Plate MEMS Oscillators Embedded in a Phase-Locked Loop for Low Limit of Detection in Liquid

Third-order intermodulation in a micromechanical thermal mixer

Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance