NDLI: Flatness-Based Control of Electrostatically Actuated MEMS With Application to Adaptive Optics: A Simulation Study

Content Provider	IEEE Xplore Digital Library
Author	Guchuan Zhu Levine, J. Praly, L. Peter, Y.-A.
Copyright Year	1992
Abstract	Typical adaptive optics (AO) applications require continual measurement and correction of aberrated light and form closed-loop control systems. One of the key components in microelectromechanical system (MEMS) based AO systems is the parallel-plate microactuator. Being electrostatically actuated, this type of devices is inherently instable beyond the pull-in position when they are controlled by a constant voltage. Therefore extending the stable travelling range of such devices forms one of the central topics in the control of MEMS. In addition, though certain control schemes, such as charge control and capacitive feedback, can extend the travelling range to the full gap, the transient behavior of actuators is dominated by their mechanical dynamics. Thus, the performance may be poor if the natural damping of the devices is too low or too high. This paper presents an alternative for the control of parallel-plate electrostatic actuators, which is based on an essential property of nonlinear systems, namely differential flatness, and combines the techniques of trajectory planning and robust nonlinear control. It is, therefore, capable of stabilizing the system at any point in the gap while ensuring desired performances. The proposed control scheme is applied to an AO system and simulation results demonstrate its advantage over constant voltage control
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1165
Ending Page	1174
Page Count	10
File Size	731423
File Format	PDF
ISSN	10577157
Volume Number	15
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-10-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical control Micromechanical devices Adaptive optics Control systems Voltage control Nonlinear control systems Electrostatic measurements Lighting control Microelectromechanical systems Microactuators trajectory planning Adaptive optics (AO) deformable mirrors (DM) electrostatic actuator flat systems microelectromechanical systems (MEMS) robust nonlinear control
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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