NDLI: Active Opening Force and Passive Contact Force Electrostatic Switches for Soft Metal Contact Materials

Content Provider	IEEE Xplore Digital Library
Author	Oberhammer, J. Stemme, G.
Copyright Year	1992
Abstract	This paper reports on a mechanically bi-stable, electrostatically actuated switch mechanism with a large active opening force and a small passive closing force, designed to fit the contact and opening force requirements of soft contact materials such as gold. So far, most microelectromechanical systems (MEMS) switch designs have been optimized for a large contact force without paying too much attention to the opening force. In the "conventional," most commonly used electrostatic microswitch concept, the force of the actuator is used to close the switch contacts, and the switch is opened by the passive restoring force of the deflected cantilever or membrane. This concept results in a large contact force, but the opening force is typically too small to overcome the contact adhesion force of soft metals, which makes this concept less suitable for contact materials such as gold with its low contact resistance at low contact forces. The switch concept presented in this paper is based on two cantilevers laterally moving by curved electrode actuators. The tips of the cantilevers are endowed with hooks which can be mechanically interlocked. In the latched state, the spring forces of the deflected cantilevers also act as the passive contact force between the switch contacts. The opening force is actively created by the curved-electrode actuators, which are utilized close to their best electromechanical operating point resulting in a maximum contact separation force. The theoretical discussion of the new concept as compared to conventional switch designs is supported by simulation results, measurements on fabricated devices, and by an analysis of exemplary switches published in the literature
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1235
Ending Page	1242
Page Count	8
File Size	1330058
File Format	PDF
ISSN	10577157
Volume Number	15
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-10-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrostatics Switches Inorganic materials Contacts Gold Actuators Microelectromechanical systems Micromechanical devices Design optimization Microswitches RF MEMS Contact material curved-electrode actuator microelectromechanical systems (MEMS) switch microswitch
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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