NDLI: Surface-micromachined microoptical elements and systems

Content Provider	IEEE Xplore Digital Library
Author	Muller, R.S. Lau, K.Y.
Copyright Year	1963
Abstract	Optical systems are ubiquitous in the present-day societal fabric, from sophisticated fiber-optic telecommunication infrastructure to visual information display, down to mundane chores such as bar-code reading at the supermarket. Most of these existing systems are built from bulk optical components, as they have been for many years. Just as miniaturization and batch-process production have revolutionized electronics, similar advances in optics will certain greatly expand its applications and markets. Production techniques for optical systems that employ the emerging micro-electromechanical systems (MEMS) technologies give promise of achieving this success. Simple micromechanical fabrication techniques are already employed in fiber-optic components to produce what is generally described as silicon-optical-bench systems. New developments, especially those permitting the use of microactuated structures, make substantial increases in system sophistication possible. Surface micromachining, in which microoptical systems are batch-fabricated and placed on top of a silicon wafer, has become a promising approach to this progression. With the demonstration that surface-micromachined elements can be "folded" out from the plane in which they are constructed, an important new degree of design freedom has emerged. This paper examines some of the results obtained and attempts to project possibilities for surface micromachining in future optical systems.
Sponsorship	IEEE Publication
Starting Page	1705
Ending Page	1720
Page Count	16
File Size	430998
File Format	PDF
ISSN	00189219
Volume Number	86
Issue Number	8
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-08-01
Publisher Place	U.S.A.
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Micromachining Fabrics Displays Optical devices Consumer electronics Batch production systems Microelectromechanical systems Optical device fabrication Silicon
Content Type	Text
Resource Type	Article
Subject	Computer Science Electrical and Electronic Engineering

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