NDLI: CAD challenges for microsensors, microactuators, and microsystems

Content Provider	IEEE Xplore Digital Library
Author	Senturia, S.D.
Copyright Year	1963
Abstract	In parallel with the development of new technologies, new device configurations, and new applications for microsensors, microactuators, and microsystems, also referred to as microelectromechanical devices and systems (MEMS), there has arisen a growing need for computer-aided engineering and design systems. There is a wide range of design problems: process simulation, solid-body geometric renderings from photomasks and process descriptions, energetically correct simulations of behavior across multiple coupled energy domains, extraction of lumped low-order models of device behavior, optimization of geometry and process sequence, and design of full systems that include MEMS devices. Because of the computational demands of the modeling required to support full computer-aided design (CAD), there is a premium on fast and memory-efficient algorithms that help the designer, both by automating, where possible, complex sets of related tasks and by providing rapid computational prototyping at critical points in the design cycle. This paper presents an overview of the present state of the art in CAD for MEMS, with particular emphasis on the role of macromodels and test structures as part of the design environment.
Sponsorship	IEEE Publication
Starting Page	1611
Ending Page	1626
Page Count	16
File Size	199018
File Format	PDF
ISSN	00189219
Volume Number	86
Issue Number	8
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-08-01
Publisher Place	U.S.A.
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microsensors Microactuators Design automation Solid modeling Microelectromechanical devices Micromechanical devices Process design Computational modeling Algorithm design and analysis Application software
Content Type	Text
Resource Type	Article
Subject	Computer Science Electrical and Electronic Engineering

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