NDLI: The benefits of fluorine in pnp polysilicon emitter bipolar transistors

Content Provider	IEEE Xplore Digital Library
Author	Moiseiwitsch, N.E. Ashburn, P.
Copyright Year	1963
Abstract	BF/sub 2/ implantation into polysilicon and its subsequent rapid thermal diffusion into single crystal silicon is commonly used for the fabrication of pnp polysilicon emitter bipolar transistors. In this paper the effect of the fluorine, which is introduced into the polysilicon during the BF/sub 2/ implant, is investigated. Pnp polysilicon emitter bipolar transistors are fabricated in which the boron and fluorine are implanted separately, with the fluorine only going into one half of each wafer. Electrical results show that fluorine has two interrelated effects. In devices given a low thermal budget emitter drive-in, a drop in base current by a factor of approximately 3.2 is observed when the fluorine is present, together with an improvement in the ideality of the base characteristics. This is explained by the passivation of trapping states at the polysilicon/silicon interface by the fluorine. In contrast, in devices-given a higher thermal budget emitter drive-in, an increase in base current by a factor of approximately 2.5 is observed, when fluorine is present. This is explained by the action of the fluorine in accelerating the breakup of the interfacial layer. A model is proposed to explain this behavior.<>
Sponsorship	IEEE Electron Devices Society
Starting Page	1249
Ending Page	1256
Page Count	8
File Size	820750
File Format	PDF
ISSN	00189383
Volume Number	41
Issue Number	7
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1994-07-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Bipolar transistors BiCMOS integrated circuits CMOS technology Voltage Delay Silicon Boron Thermal factors Fabrication Implants
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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