NDLI: Controlling the Magnetic Properties of Cr-Implanted Co/Pt Multilayer Films Using Ion Irradiation for Planar Patterned Media

Content Provider	IEEE Xplore Digital Library
Author	Suharyadi, E. Kato, T. Iwata, S.
Copyright Year	1965
Abstract	We have investigated the modification of the microstructure and magnetic properties of Co/Pt multilayer films with various layer structures using ion beam irradiation. Cr/[Co/Pt] multilayer films prepared by a magnetron sputtering deposition on a surface oxidized Si substrate were irradiated by 30 keV Kr⁺ ion beam with various ion doses from 1×10¹⁴ to 5×10¹⁵ ions/cm². The modifications of magnetic properties and microstructures due to Kr⁺ ion irradiation depended on Co/Pt layer structures. The as-prepared [Co(0.4 nm)/Pt(0.45 nm)]15 multilayer films were confirmed to exhibit the square shaped M-H loop and the perpendicular easy axis with a saturation magnetization of 620 emu/cc and coercivity of 1.1 kOe. After the irradiation with ion dose of 5×10¹⁵ ions/cm², the easy axis changes from perpendicular to in-plane direction. The coercivity and saturation magnetization decrease down to 2% and 13% of its original values, respectively. The decrease of coercivity and saturation magnetization is due to the implantation of the Cr atom in the top most layers into Co/Pt multilayer films caused by Kr⁺ ion irradiation, as confirmed from Auger electron spectroscopy (AES) depth profiles.
Sponsorship	IEEE Magnetics Society
Starting Page	1
Ending Page	4
Page Count	4
File Size	1051628
File Format	PDF
ISSN	00189464
Volume Number	50
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Nonhomogeneous media Saturation magnetization Radiation effects Magnetic multilayers Magnetic domains Atomic layer deposition planar bit patterned media Atom implantation Co/Pt multilayers ion beam irradiation
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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