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Evolving mems resonator designs for fabrication
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Kraus, William F. Hornby, Gregory S. Lohn, Jason D. |
| Copyright Year | 2008 |
| Description | Because of their small size and high reliability, microelectromechanical (MEMS) devices have the potential to revolution many areas of engineering. As with conventionally-sized engineering design, there is likely to be a demand for the automated design of MEMS devices. This paper describes our current status as we progress toward our ultimate goal of using an evolutionary algorithm and a generative representation to produce designs of a MEMS device and successfully demonstrate its transfer to an actual chip. To produce designs that are likely to transfer to reality, we present two ways to modify evaluation of designs. The first is to add location noise, differences between the actual dimensions of the design and the design blueprint, which is a technique we have used for our work in evolving antennas and robots. The second method is to add prestress to model the warping that occurs during the extreme heat of fabrication. In future we expect to fabricate and test some MEMS resonators that are evolved in this way. |
| File Size | 256651 |
| Page Count | 12 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20090029402 |
| Archival Resource Key | ark:/13960/t43r5v20j |
| Language | English |
| Publisher Date | 2008-09-21 |
| Access Restriction | Open |
| Subject Keyword | Electronics And Electrical Engineering Microelectromechanical Systems Fabrication Position Location Algorithms Blueprints Chips Reliability Resonators Robots Ntrs Nasa Technical Reports ServerĀ (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Article |