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Mems reliability assurance activities at jpl
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Lawton, R. Stark, B. Kayali, S. |
| Copyright Year | 2000 |
| Description | An overview of Microelectromechanical Systems (MEMS) reliability assurance and qualification activities at JPL is presented along with the a discussion of characterization of MEMS structures implemented on single crystal silicon, polycrystalline silicon, CMOS, and LIGA processes. Additionally, common failure modes and mechanisms affecting MEMS structures, including radiation effects, are discussed. Common reliability and qualification practices contained in the MEMS Reliability Assurance Guideline are also presented. |
| File Size | 313415 |
| File Format | |
| Language | English |
| Publisher Date | 2000-01-01 |
| Access Restriction | Open |
| Subject Keyword | Electronics And Electrical Engineering Microelectromechanical Systems Single Crystals Radiation Effects Failure Modes Polycrystals Silicon Reliability Cmos Ntrs Nasa Technical Reports ServerĀ (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |