NDLI: Mems incandescent light source

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Mems incandescent light source

Content Provider	NASA Technical Reports Server (NTRS)
Author	George Sr., Thomas Hansler, Richard Jones, Eric King, Kevin Tuma, Margaret Kim, Lynn
Copyright Year	2001
Description	A MEMS-based, low-power, incandescent light source is being developed. This light source is fabricated using three bonded chips. The bottom chip consists of a reflector on Silicon, the middle chip contains a Tungsten filament bonded to silicon and the top layer is a transparent window. A 25-micrometer-thick spiral filament is fabricated in Tungsten using lithography and wet-etching. A proof-of-concept device has been fabricated and tested in a vacuum chamber. Results indicate that the filament is electrically heated to approximately 2650 K. The power required to drive the proof-of-concept spiral filament to incandescence is 1.25 W. The emitted optical power is expected to be approximately 1.0 W with the spectral peak at 1.1 microns. The micromachining techniques used to fabricate this light source can be applied to other MEMS devices.
File Size	6739178
Page Count	8
File Format	PDF
Alternate Webpage(s)	http://archive.org/details/NASA_NTRS_Archive_20010061367
Archival Resource Key	ark:/13960/t40s4qj25
Language	English
Publisher Date	2001-01-01
Access Restriction	Open
Subject Keyword	Optics Microelectromechanical Systems Chips Tungsten Micromachining Silicon Etching Incandescence Light Sources Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science
Content Type	Text
Resource Type	Article

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