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The development of silicon carbide based hydrogen and hydrocarbon sensors
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Liu, Chung-Chiun |
| Copyright Year | 1994 |
| Description | Silicon carbide is a high temperature electronic material. Its potential for development of chemical sensors in a high temperature environment has not been explored. The objective of this study is to use silicon carbide as the substrate material for the construction of chemical sensors for high temperature applications. Sensors for the detection of hydrogen and hydrocarbon are developed in this program under the auspices of Lewis Research Center, NASA. Metal-semiconductor or metal-insulator-semiconductor structures are used in this development. Specifically, using palladium-silicon carbide Schottky diodes as gas sensors in the temperature range of 100 to 400 C are designed, fabricated and assessed. The effect of heat treatment on the Pd-SiC Schottky diode is examined. Operation of the sensors at 400 C demonstrate sensitivity of the sensor to hydrogen and hydrocarbons. Substantial progress has been made in this study and we believe that the Pd-SiC Schottky diode has potential as a hydrogen and hydrocarbon sensor over a wide range of temperatures. However, the long term stability and operational life of the sensor need to be assessed. This aspect is an important part of our future continuing investigation. |
| File Size | 429021 |
| Page Count | 11 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19970035960 |
| Archival Resource Key | ark:/13960/t51g5mq3h |
| Language | English |
| Publisher Date | 1994-01-01 |
| Access Restriction | Open |
| Subject Keyword | Schottky Diodes Service Life Heat Treatment Semiconductor Devices Hydrogen Measuring Instruments Hydrocarbons Silicon Carbides Palladium High Temperature High Temperature Environments Substrates Fabrication Refractory Materials Sensitivity Product Development Mis Semiconductors Gas Detectors Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |
