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Dopant incorporation efficiency in cvd silicon carbide epilayers
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Larkin, D. J. |
| Copyright Year | 1996 |
| Description | In order to ensure reproducible and reliable SiC semiconductor device characteristics, controlled dopant incorporation must be accomplished. Some of the many factors which greatly influence dopant incorporation are the site-competition effect, SiC(0001) substrate polarity, substrate temperature, and the dopant-source reactor concentration. In this paper, dopant incorporation is considered and compared for various dopants in the context of dopant incorporation efficiency. By using secondary ion mass spectrometry (SIMS), the relative dopant incorporation efficiencies were calculated by dividing the SIMS determined dopant concentration in the resulting epitaxial layer by the intentional gas phase dopant concentration used during the SiC CVD. Specifically, the relative magnitudes of dopant incorporation efficiencies for nitrogen, phosphorus, and boron in 6H-SiC (0001) Si-face epitaxial layers are compared as a function of the site-competition effect and the dopant-source reactor concentrations. This serves as a first approximation for comparison of the relative 'doping potencies' of some common dopants used in SiC CVD epitaxial growth. |
| File Size | 475604 |
| Page Count | 8 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19970019642 |
| Archival Resource Key | ark:/13960/t09w5cp0z |
| Language | English |
| Publisher Date | 1996-01-01 |
| Access Restriction | Open |
| Subject Keyword | Solid-state Physics Interlayers Boron Vapor Deposition Additives Semiconductor Devices Epitaxy Vapor Phases Silicon Carbides Phosphorus Secondary Ion Mass Spectrometry Nitrogen Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Article |
