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Ingot slicing machine and method
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 1984 |
| Description | An improved method for simultaneously slicing one or a multiplicity of boules of silicon into silicon wafers is described. A plurality of vertical stacks of horizontal saw blades of circular configuration are arranged in juxtaposed coaxial alignment. Each blade is characterized by having a cutting diameter slightly greater than the cutting diameter of the blade arranged immediately above, imparting a simultaneous rotation to the blades. |
| File Size | 649829 |
| Page Count | 12 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19850013340 |
| Archival Resource Key | ark:/13960/t6n06041w |
| Language | English |
| Publisher Date | 1984-10-09 |
| Access Restriction | Open |
| Subject Keyword | Mechanical Engineering Boules Single Crystals Alignment Wafers Rotation Silicon Films Saws Blades Cutters Ntrs Nasa Technical Reports ServerĀ (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |