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Rf sputtered silicon and hafnium nitrides as applied to 440c steel
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Aron, P. R. Grill, A. |
| Copyright Year | 1984 |
| Description | Silicon nitride and hafnium nitride coatings were deposited on oxidized and unoxidized 440C stainless steel substrates. Sputtering was done in mixtures of argon and nitrogen gases from pressed powder silicon nitride and from hafnium metal targets. The coatings and the interface between the coating and substrate were investigated by X-ray diffractometry, scanning electron microscopy, energy dispersive X-ray analysis and Auger electron spectroscopy. Oxide was found at all interfaces with an interface width of at least 600 A for the oxidized substrates and at least 300 A for the unoxidized substrates. Scratch test results demonstrate that the adhesion of hafnium nitride to both oxidized and unoxidized 440C is superior to that of silicon nitride. Oxidized 440C is found to have increased adhesion, to both nitrides, over that of unoxidized 440C. Coatings of both nitrides deposited at 8 mtorr were found to have increased adhesion to both oxidized and unoxidized 440C over those deposited at 20 mtorr. |
| File Size | 1797945 |
| Page Count | 30 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19840024465 |
| Archival Resource Key | ark:/13960/t81k47r5v |
| Language | English |
| Publisher Date | 1984-03-01 |
| Access Restriction | Open |
| Subject Keyword | Nonmetallic Materials Scanning Electron Microscopy Auger Spectroscopy Oxides Coatings Microhardness Adhesion X Ray Diffraction Substrates Stainless Steels Sputtering Coefficient of Friction Silicon Nitrides Hafnium Compounds Microstructure Ntrs Nasa Technical Reports ServerĀ (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |