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Improved refractory coatings. [sputtered coatings on substrates that form stable nitrides
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 1980 |
| Description | The adhesion, friction and wear properties of sputtered refractory coatings on substrates of materials that form stable nitrides are enhanced by placing each substrate directly below a titanium carbide target of a commercial radiofrequency diode apparatus in a vacuum chamber. Nitrogen is bled into the system through a nozzle resulting in a small partial pressure of about 0.5% to 2.5% during the first two minutes of deposition. The flow of nitrogen is then stopped, and the sputtering ambient is reduced to pure argon through a nozzle without interrupting the sputtering process. When nitrogen is deliberately introduced during the crucial interface formation, some of the titanium at the interface reacts to form titanium nitride while the metal of the substrate also forms the nitride. These two nitrides atomically mixed together in the interfacial region act to more strongly bond the growing titanium carbide coating as it forms on the substrate. |
| File Size | 375996 |
| Page Count | 8 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19810007693 |
| Archival Resource Key | ark:/13960/t0tr0qg56 |
| Language | English |
| Publisher Date | 1980-09-29 |
| Access Restriction | Open |
| Subject Keyword | Metallic Materials Refractory Materials Friction Metal Surfaces Wear Inhibitors Adhesion Protective Coatings Gas-metal Interactions Sputtering Substrates Vacuum Deposition Titanium Nitrides Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
