NDLI: Stability of Self-Assembled Monolayers on Gold for MEMS/NEMS Applications

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Ang, X. F. Lin, A. T. Li, J. Wei, J. Chen, Z. Wong, C. C.
Copyright Year	2008
Abstract	Stability of self-assembled monolayers on gold under various environmental conditions is a crucial component in many biological, chemical and mechanical surface-functionalizations. In this study, we investigate the effects of relative humidity, ambient conditions (air, nitrogen-purged) and temperature on the structural stability of alkanethiols on gold at different chain length using contact angle measurements and time-of-flight secondary ions mass spectroscopy (TOF-SIMS). The ability of self-assembled monolayers functioning under these conditions is critical in protecting gold metal surfaces especially, from surface contamination. This in turn, affects the bonding conditions required in wafer level bonding process which is a key fabrication step in microelectromechanical (MEMs) and nanoelectromechanical (NEMs) systems. Such findings are particularly important in bioMEMs or bioNEMs since gold is one of the most common microfabrication material used in MEMs drug delivery devices due to its superior biocompatibility and reduced biofouling.
Starting Page	5
Ending Page	10
Page Count	6
File Format	PDF
ISBN	9780791848678
DOI	10.1115/IMECE2008-66908
e-ISBN	9780791838402
Volume Number	Volume 6: Electronics and Photonics
Conference Proceedings	ASME 2008 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2008-10-31
Publisher Place	Boston, Massachusetts, USA
Access Restriction	Subscribed
Subject Keyword	Microelectromechanical systems Chain Drug delivery systems Temperature Stability Structural stability Flight Ions Secondary ion mass spectrometry Semiconductor wafers Nitrogen Contamination Self-assembly Nanoelectromechanical systems Metal surfaces Microfabrication Biofouling Biomedical microelectromechanical systems Biocompatibility Manufacturing Bonding Mass spectrometry
Content Type	Text
Resource Type	Article

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