NDLI: Thermal Conductivity of Ultra Thin Single Crystal Silicon Layers: Part II — Experimental Data and Modeling at High Temperatures

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Liu, Wenjun Asheghi, Mehdi Goodson, K. E.
Copyright Year	2004
Abstract	Simulations of the temperature field in Silicon-on-Insulator (SOI) and strained-Si transistors can benefit from experimental data and modeling of the thin silicon layer thermal conductivity at high temperatures. This work presents the first experimental data for 20 and 100 nm thick single crystal silicon layers at high temperatures and develops algebraic expressions to account for the reduction in thermal conductivity due to the phonon-boundary scattering for pure and doped silicon layers. The model applies to temperatures range 300–1000 K for silicon layer thicknesses from 10 nm to 1 μm (and even bulk) and agrees well with the experimental data. In addition, the model has an excellent agreement with the predictions of thin film thermal conductivity based on thermal conductivity integral and Boltzmann transport equation, although it is significantly more robust and convenient for integration into device simulators. The experimental data and predictions are required for accurate thermal simulation of the semiconductor devices, nanostructures and in particular the SOI and strained-Si transistors.
Sponsorship	Heat Transfer Division
Starting Page	181
Ending Page	189
Page Count	9
File Format	PDF
ISBN	079184711X
DOI	10.1115/IMECE2004-62107
Volume Number	Heat Transfer, Volume 2
Conference Proceedings	ASME 2004 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2004-11-13
Publisher Place	Anaheim, California, USA
Access Restriction	Subscribed
Subject Keyword	Radiation scattering Temperature Scattering (physics) Semiconductor devices Silicon-on-insulator Crystals Phonons High temperature Nanostructures Modeling Thin films Algebra Simulation Electromagnetic scattering Thermal conductivity Silicon Transistors
Content Type	Text
Resource Type	Article

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