NDLI: Integration of a broad beam ion source with a high-temperature x-ray diffraction vacuum chamber.

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Integration of a broad beam ion source with a high-temperature x-ray diffraction vacuum chamber.

Content Provider	World Health Organization (WHO)-Global Index Medicus
Author	Rauschenbach, B. Bergmann, A. Manova, D. Mändl, S. Neumann, H.
Description	Country affiliation: Germany Author Affiliation: Manova D ( Leibniz-Institut fuÌ r OberflaÌ chenmodifizierung e. V., Permoserstr. 15, 04318 Leipzig, Germany. darina.manova@iom-leipzig.de)
Abstract	Here, the integration of a low energy, linearly variable ion beam current density, mechanically in situ adjustable broad beam ion source with a high-temperature x-ray diffraction (XRD) vacuum chamber is reported. This allows in situ XRD investigation of phase formation and evolution processes induced by low energy ion implantation. Special care has been taken to an independent adjustment of the ion beam for geometrical directing towards the substrate, a 15 mm small ion source exit aperture to avoid a secondary sputter process of the chamber walls, linearly variable ion current density by using a pulse length modulation (PLM) for the accelerating voltages without changing the ion beam density profile, nearly homogeneous ion beam distribution over the x-ray footprint, together with easily replaceable Kapton(®) windows for x-rays entry and exit. By combining a position sensitive x-ray detector with this PLM-modulated ion beam, a fast and efficient time resolved investigation of low energy implantation processes is obtained in a compact experimental setup.
ISSN	00346748
Issue Number	11
Journal	Review of Scientific Instruments
Volume Number	83
e-ISSN	10897623
Language	English
Publisher	American Institute of Physics
Publisher Date	2012-11-01
Publisher Place	United States
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Discipline Physics Discipline Chemistry
Content Type	Text
Resource Type	Article
Subject	Medicine Instrumentation

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
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Integration of a broad beam ion source with a high-temperature x-ray diffraction vacuum chamber.

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