NDLI: Influence of precursors chemistry on ALD growth of cobalt

Content Provider	World Health Organization (WHO)-Global Index Medicus
Author	Balasundaram, Murugan Fjellvåg, Helmer Diskus, Madeleine Nilsen, Ola
Description	Author Affiliation: Diskus M ( University of Oslo, Department of Chemistry, Innovative Natural Gas Processes and Products, Centre for Material Science and Nanotechnology, P.O. Box 1033 Blindern, N-0315, Oslo, Norway.)
Abstract	Cobalt molybdenum compounds are important catalytic materials in many processes, e.g. in splitting of ammonia to form CO free hydrogen fuel . We here report on deposition of such cobalt molybdenum oxides by atomic layer deposition ( ALD ) using different types of metal precursors CoCp $_{2}$ (Cp = cyclopentadienyl ), Co(thd) $_{2}$ (Hthd = 2,2,6,6-tetramethylheptan-3,5-dione ), Mo(CO) $_{6}$ and oxygen precursors $O_{3},$ H $_{2}O$ , and $(O_{3}$ + H $_{2}O$ ). The growth dynamics have been investigated using quartz crystal microbalance ( QCM ) methods. It is evident that mixing of the different precursor chemistries affect the growth patterns. When water is introduced to the reactions, a surface controlled mechanism takes place which guides the deposited stoichiometry towards the CoMoO $_{4}$ phase over a wide range of cobalt rich pulsed compositions. This is a rare example of how surface chemistry can control stoichiometry of depositions in ALD . The deposited films have been investigated by X-ray diffraction , Raman spectroscopy and atomic force microscopy . The catalytic activity of selected films have been characterized by temperature programmed ammonia decomposition , proving the films to be catalytically active and lowering the decomposition temperature by some 200 °C.
ISSN	14779226
Issue Number	8
Journal	Dalton Trans.
Volume Number	41
e-ISSN	13645447
Language	English
Publisher	Royal Society of Chemistry
Publisher Date	2012-02-28
Publisher Place	Great Britain (UK)
Access Restriction	Subscribed
Subject Keyword	Chemistry
Content Type	Text
Resource Type	Article
Subject	Inorganic Chemistry

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in