NDLI: Millimeter-Scale Piezoresistive Cantilevers for Accurate Force Measurements at the Nano-Newton Level

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MAPAN : Volume 28, Issue 4, December 2013

Foreword

Nano-Science and Nano-metrology for Societal Benefits

Practical and Fundamental Impact of Epitaxial Graphene on Quantum Metrology

Millimeter-Scale Piezoresistive Cantilevers for Accurate Force Measurements at the Nano-Newton Level

Size Distribution of SnO$_{2}$ Quantum Dots Studied by UV–Visible, Transmission Electron Microscopy and X-Ray Diffraction

Role of NPL-India in Nanotechnology and Nanometrology

Interaction Studies of Anticancer Drug Lomustine with Calf Thymus DNA using Surface Enhanced Raman Spectroscopy

Raman Spectral Mapping of III–V Nitride and Graphene Nanostructures

Prospects of the Emerging Raman Scattering Tools for Surface and Nanoanalysis

Nanometrology in Emerging Economies: The Case of Mexico

Atomic Force Microscopy as a Nanometrology Tool: Some Issues and Future Targets

Synthesis of High Luminescence Efficiency Nanosized Ca$_{2}$SiO$_{4}$:Eu$^{2+}$ Phosphor Powder by Liquid Phase Precursor Technique

Quantitative Analysis of X-ray Lithographic Pores by SEM Image Processing

Cryogenic Current Comparators for the Realisation of Electrical Quantum Standards

MAPAN : Volume 28, Issue 3, September 2013

MAPAN : Volume 28, Issue 2, June 2013

MAPAN : Volume 28, Issue 1, March 2013

Millimeter-Scale Piezoresistive Cantilevers for Accurate Force Measurements at the Nano-Newton Level

Content Provider	Springer Nature Link
Author	Kim, Min Seok Park, Yon Kyu Kim, Jong Ho
Copyright Year	2013
Abstract	This paper reports a development of millimeter-scale cantilevers equipped with piezoresistive deflection sensing metrology as a force sensor at the micro- and nano-Newton level. The cantilevers was designed and fabricated to minimize the error during the force transfer or calibration, so that they have full-bridge type piezoresistors, a large length and width and reference marks to facilitate the positioning of probes or tips onto the piezoresistive cantilevers. Their 6 mm-long and 0.4 mm-wide dimensions can reduce the error due to incomplete contact (or loading) position. The reference marks on the cantilever can give you a range of stiffness and force sensitivity with a single piezoresistive cantilever. The stiffness can vary from 25 N m$^{−1}$ at the first mark to 0.04 N m$^{−1}$ at the last. The full-bridge piezoresistors give an electrical signal proportional to the applied force with superior temperature independency. The fabricated piezoresistive cantilevers were calibrated with the KRISS nano force calibrator (NFC). The results showed that the stiffness and the force sensitivity at the last mark was determined to be 0.0502 N m$^{−1}$ and 0.357 (mV/V) μN$^{−1}$, respectively. The performances were tested by calibrating stiffness of commercial cantilevers using the cantilever-on-cantilever method with a fabricated cantilever and comparing calibration results with stiffness obtained from calibration using the NFC. Two results match to each other within approximately 10 % discrepancy.
Starting Page	251
Ending Page	257
Page Count	7
File Format	PDF
ISSN	09703950
Journal	MAPAN
Volume Number	28
Issue Number	4
e-ISSN	09749853
Language	English
Publisher	Springer India
Publisher Date	2013-11-26
Publisher Institution	Metrology Society of India
Publisher Place	India
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Cantilever Force Force calibration Atomic force microscope Measurement Science and Instrumentation Theoretical, Mathematical and Computational Physics Mathematical Methods in Physics Numerical and Computational Physics
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy

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Atomic Force Microscopy as a Nanometrology Tool: Some Issues and Future Targets

Improved Calibration Method for Lateral Force of the Cantilever Deflection Force Sensor in Atomic Force Microscope

Present problems in coordinate metrology for nano and micro scale measurements

Atomic force microscope with an adjustable probe direction and piezoresistive cantilevers operated in tapping-mode / Im Tapping-Modus betriebenes Rasterkraftmikroskop mit einstellbarer Antastrichtung und piezoresistiven Cantilevern

A study of the characteristics of the cantilevers of atomic-force microscopes

Integrated Calibration System for Accurate AC Current Measurements up to 100 kHz

Calibration of the spring constants of various AFM cantilevers with the small uncertainty level of 2%

Thermal Calibration of Heated Silicon Atomic Force Microscope Cantilevers

Note: Improved calibration of atomic force microscope cantilevers using multiple reference cantilevers.

Millimeter-Scale Piezoresistive Cantilevers for Accurate Force Measurements at the Nano-Newton Level

Similar Documents

Atomic Force Microscopy as a Nanometrology Tool: Some Issues and Future Targets

Improved Calibration Method for Lateral Force of the Cantilever Deflection Force Sensor in Atomic Force Microscope

Present problems in coordinate metrology for nano and micro scale measurements

Atomic force microscope with an adjustable probe direction and piezoresistive cantilevers operated in tapping-mode / Im Tapping-Modus betriebenes Rasterkraftmikroskop mit einstellbarer Antastrichtung und piezoresistiven Cantilevern

A study of the characteristics of the cantilevers of atomic-force microscopes

Integrated Calibration System for Accurate AC Current Measurements up to 100 kHz

Calibration of the spring constants of various AFM cantilevers with the small uncertainty level of 2%

Thermal Calibration of Heated Silicon Atomic Force Microscope Cantilevers

Note: Improved calibration of atomic force microscope cantilevers using multiple reference cantilevers.

Millimeter-Scale Piezoresistive Cantilevers for Accurate Force Measurements at the Nano-Newton Level