NDLI: Ti-Si-N films prepared by magnetron sputtering

Content Provider	Springer Nature Link
Author	Pan, Li Bai, Yizhen Zhang, Dong Wang, Jian
Copyright Year	2012
Abstract	A film growth mechanism, expressed in terms of depositing hard films onto the soft substrate, was proposed. Multicomponent thin films of Ti-Si-N were deposited onto Al substrate with a double-target magnetron sputtering system in an Ar-N$_{2}$ gas mixture. The Ti-Si-N films were investigated by characterization techniques such as X-ray diffraction (XRD), atomic force microscope (AFM), electron probe microanalyzer (EPMA), scratch test and nanoindentation. The as-deposited films have a good adhesion to Al substrate and appear with smooth and lustrous surface. The films show nanocomposite structure with nano TiN grains embedded in an amorphous SiN$_{ x }$ matrix. The maximum hardness of the films was achieved as high as 27 GPa. The influences of the N$_{2}$ flow rate and substrate temperature on the growth rate and quality of the films were also discussed. For all samples, the Ar flow rate was maintained constant at 10 ml·min$^{−1}$, while the flow rate of N$_{2}$ was varied to analyze the structural changes related to chemical composition and friction coefficient. The low temperature in the deposited Ti-Si-N films favors the formation of crystalline TiN, and it leads to a lower hardness at low N$_{2}$ flow rate. At the same time, the thin films deposited are all crystallized well and bonded firmly to Al substrate, with smooth and lustrous appearance and high hardness provided. The results indicate that magnetron sputtering is a promising method to deposit hard films onto soft substrate.
Starting Page	183
Ending Page	188
Page Count	6
File Format	PDF
ISSN	10010521
Journal	Rare Metals
Volume Number	31
Issue Number	2
e-ISSN	18677185
Language	English
Publisher	Nonferrous Metals Society of China
Publisher Date	2012-03-30
Publisher Place	Springer Berlin Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Ti-Si-N films nanocomposite nanoindentation hardness Inorganic Chemistry Surfaces and Interfaces, Thin Films Physical Chemistry Nanotechnology Metallic Materials Ceramics, Glass, Composites, Natural Methods
Content Type	Text
Resource Type	Article
Subject	Materials Chemistry Metals and Alloys Physical and Theoretical Chemistry Condensed Matter Physics

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