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| Content Provider | Springer Nature Link |
|---|---|
| Author | Chen, Meiyun Takahashi, Satoru Takamasu, Kiyoshi |
| Copyright Year | 2016 |
| Abstract | Flatness tolerance of mirror is usually determined for a particular manufactured product based on the user’s requirement. To help meet this requirement, we here propose a high-accuracy microscale flatness-measuring machine (micro-FMM) that consists of a multi-beam angle sensor (MBAS). We review the techniques and the sensors predominantly used in the industry to quantify flatness. Compared with other methods, the MBAS can eliminate zero-difference error by circumferential scan and automatically eliminates the tilt error caused by the rotation of a workpiece. Our optical probe uses the principle of an autocollimator, and the flatness measurement of the mirror comprises two steps. First, the MBAS is designed to rotate around a circle with a given radius. The workpiece surface profile along this trajectory is then measured by the micro-FMM. Experimental results, confirming the suitability of the MBAS for measuring flatness are also presented. |
| Starting Page | 1093 |
| Ending Page | 1099 |
| Page Count | 7 |
| File Format | |
| ISSN | 22347593 |
| Journal | International Journal of Precision Engineering and Manufacturing |
| Volume Number | 17 |
| Issue Number | 9 |
| e-ISSN | 20054602 |
| Language | English |
| Publisher | Korean Society for Precision Engineering |
| Publisher Date | 2016-09-10 |
| Publisher Place | Seoul |
| Access Restriction | One Nation One Subscription (ONOS) |
| Subject Keyword | Micro-FMM Multi-beam angle sensor Flatness Autocollimator Stage-independence Industrial and Production Engineering Materials Science |
| Content Type | Text |
| Resource Type | Article |
| Subject | Industrial and Manufacturing Engineering Mechanical Engineering Electrical and Electronic Engineering |
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