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Multi-beam angle sensor for flatness measurement of mirror using circumferential scan technology
| Content Provider | Semantic Scholar |
|---|---|
| Author | Chen, Meiyun Takahashi, Satoru Takamasu, Kiyoshi |
| Copyright Year | 2016 |
| Abstract | Flatness tolerance of mirror is usually determined for a particular manufactured product based on the user's requirement. To help meet this requirement, we here propose a high-accuracy microscale flatness-measuring machine (micro-FMM) that consists of a multi-beam angle sensor (MBAS). We review the techniques and the sensors predominantly used in the industry to quantify flatness. Compared with other methods, the MBAS can eliminate zero-difference error by circumferential scan and automatically eliminates the tilt error caused by the rotation of a workpiece. Our optical probe uses the principle of an autocollimator, and the flatness measurement of the mirror comprises two steps. First, the MBAS is designed to rotate around a circle with a given radius. The workpiece surface profile along this trajectory is then measured by the micro-FMM. Experimental results, confirming the suitability of the MBAS for measuring flatness are also presented. |
| Starting Page | 1093 |
| Ending Page | 1099 |
| Page Count | 7 |
| File Format | PDF HTM / HTML |
| DOI | 10.1007/s12541-016-0133-6 |
| Volume Number | 17 |
| Alternate Webpage(s) | https://page-one.springer.com/pdf/preview/10.1007/s12541-016-0133-6 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
