NDLI: Optimization of AZO films prepared on flexible substrates

Content Provider	Springer Nature Link
Author	Hu, C. C. Lu, T. W. Chou, C. Y. Wang, J. T. Huang, H. H. Hsu, C. Y.
Copyright Year	2014
Abstract	Transparent conductive Al$_{2}$O$_{3}$-doped zinc oxide (in AZO, Al$_{2}$O$_{3}$ content is ~ 2 wt%) thin films are deposited on flexible polyethylene terephthalate (PET) substrates, using radio frequency (rf) magnetron sputtering. The Taguchi method with an L $_{9}$ (3$^{4}$) orthogonal array, a signal-to-noise ratio and analysis of variance (ANOVA) was used to determine the performance characteristics of the coating operations. Using grey relational analysis, the optimization of these deposition process parameters for AZO thin films with multiple characteristics was performed. The electrical resistivity of AZO/PET films is reduced from 2.6 × 10$^{−2}$ to 5.5 × 10$^{−3}$ Ω-cm and the visible range transmittance is > 83%, using the grey relational analysis. ANOVA results for the grey relational grade indicate that rf power and working pressure are the two most influential factors. The effect of the rf power (in the range from 30 to 70 W) and the argon working pressure (in the range from 0.90 to 1.1 Pa) on the morphology and optoelectronic performance of AZO films are also investigated. An analysis of the influence of the dominant parameters in the optimal design region is helpful for adjustment of the coating parameters.
Starting Page	1275
Ending Page	1282
Page Count	8
File Format	PDF
ISSN	02504707
Journal	Bulletin of Materials Science
Volume Number	37
Issue Number	6
e-ISSN	09737669
Language	English
Publisher	Springer India
Publisher Date	2014-11-21
Publisher Institution	Indian Academy of Sciences
Publisher Place	India
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Flexible substrates Al$_{2}$O$_{3}$-doped zinc oxide magnetron sputtering grey relational analysis Materials Science Engineering
Content Type	Text
Resource Type	Article
Subject	Mechanics of Materials Materials Science

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