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  1. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
  2. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 11
  3. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 11, Issue 2, March 2017
  4. Investigation of an ion-implanted semiconductor layer by X-ray fluorescence analysis and ellipsometry
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Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 11
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 11, Issue 3, May 2017
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 11, Issue 2, March 2017
On the current state of field-emission electronics
On the effect of laser irradiation and heat treatment on the structure and field-emission properties of carbon nanowalls
Pulsed magnetron sputtering and ion-induced annealing of carbon films
Tribological and mechanical properties of composites based on ethylene-tetrafluoroethylene and quasicrystalline Al−Cu−Fe filler
On the influence of phase transformations in a metal matrix of composite materials upon mechanical alloying during the disintegration of agglomerates of nanodiamond reinforcing particles
Ion-beam formation of electrocatalysts for fuel cells with polymer membrane electrolyte
Measurements of electrophysical properties of metal microcontacts using fractal geometry methods for the analysis of atomic-force-microscopy data
SEM identification of the amorphous state of Fe−B ribbons
Anisotropic magnetoresistive transducers on the basis of a self-aligned structure
Dimension of similarity as a characteristic of the solid-surface relief
Complex analysis of microparticles deposited from arc-discharge plasma on vacuum-chamber walls
Investigation of X-ray diffraction limitations upon the analysis of tellurium-atom injection into GaAs epitaxial layers
Preparation and characterization of cerium doped LaCoO$_{3}$ perovskite
Investigation of an ion-implanted semiconductor layer by X-ray fluorescence analysis and ellipsometry
Study of the mechanism of the particle—substrate interaction in the case of the impact of a supersonic heterogeneous flow on a flat solid wall
Role of vacancies and adsorbed atoms in the channeling of molecular particles in CNTs
Changes in the parameters of p-Ge compression curves for various methods of plastic deformation
Spin current in a two-terminal quantum ring
Nonlinear Raman scattering of photons by a channeled particle
Primary information sensors for AFM based on quasiparticle flows
Studying the formation of a true-secondary-electron signal in the low-voltage SEM mode
Structural conditionality of the physical properties of the new representatives of the family of superprotonic crystals
Features of the Auger spectra of Ti$_{2}$C, SiC, and WC
Ultraviolet sensitization of high-energy heavy-ion tracks in polyethylene terephthalate
Study of hydrophobized mesostructured material MCM-41-C1 by gas adsoption and liquid porometry methods
Changes in the microstructure and operational characteristics of the MK-40 sulfocation-exchange membrane during the electrodialysis of natural waters
On algorithms for calculating the SVL-fluorescence spectra of polyatomic molecules
Development and study of a conceptual model of an X-ray source with a field emission cathode
Study of the optimum conditions of a vacuum holographic microscope
Influence of the plasma-immersion ion implantation of titanium on the structure, morphology, and composition of the surface layer of Zr–1Nb alloy
Preparation of nanostructured gold films and analysis of their catalytic properties
Phase-formation mechanisms on composite oxide surfaces in thermostimulated segregation processes
Effect of preheating on the morphology of an aluminum alloy surface under irradiation with a high-power ion beam
Effect of thermal and laser annealing on the atom distribution profiles in Si(111) implanted with P$^{+}$ and B$^{+}$ ions
On the synthesis of nanoscale phases of metal silicides in the near-surface region of silicon and the study of their electronic structures by passing light
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 11, Issue 1, January 2017
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 10
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 9
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 8
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 7
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 6
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 5
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 4
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 3
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 2
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 1

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Investigation of an ion-implanted semiconductor layer by X-ray fluorescence analysis and ellipsometry

Content Provider Springer Nature Link
Author Kalmykov, Sh. A.
Copyright Year 2017
Abstract A method for determining the depth distribution of ion-implanted impurity atoms in semiconductors is developed. The method consists in measuring the concentration of impurities by X-ray fluorescence analysis upon the ellipsometry controlled removal of thin semiconductor layers. It is found that the prolonged low-energy X-ray radiation exposure of an ion-implanted semiconductor layer leads to a change in the distribution profile of the ion-implanted impurity atoms.
Starting Page 371
Ending Page 374
Page Count 4
File Format PDF
ISSN 10274510
Journal Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
Volume Number 11
Issue Number 2
e-ISSN 18197094
Language English
Publisher Pleiades Publishing
Publisher Date 2017-04-27
Publisher Place Moscow
Access Restriction One Nation One Subscription (ONOS)
Subject Keyword ion implantation X-ray fluorescence analysis distribution profile of atoms penetration depth anodic oxidation ellipsometry Surfaces and Interfaces, Thin Films
Content Type Text
Resource Type Article
Subject Nanoscience and Nanotechnology Surfaces, Coatings and Films
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