NDLI: A Study on a Surface Preparation Method for Single-Crystal SiC Using an Fe Catalyst

Content Provider	Springer Nature Link
Author	Kubota, Akihisa Yagi, Keita Murata, Junji Yasui, Heiji Miyamoto, Shiro Hara, Hideyuki Sa, Yasuhisa Yamauchi, Kazuto
Copyright Year	2008
Abstract	In this study we investigated the possibility of removing and flattening a single-crystal silicon carbide (SiC) surface by a novel polishing method utilizing hydroxyl radicals (OH radicals) generated on an Fe catalyst surface. To demonstrate the feasibility of preparing a smooth SiC surface, an Fe catalyst and a SiC substrate were rubbed together in H$_{2}$O$_{2}$ solution, and then the area on the SiC surface that had come into contact with the Fe catalyst was observed in detail. The removal depth and surface microroughness were measured and evaluated using a phase-shift interference microscope and an atomic force microscope (AFM), respectively. Moreover, the removal of material from the SiC surface by utilizing an Fe catalyst rod was examined. The obtained results show that the hard SiC surface can be effectively polished and that the processed area on the SiC surface has atomic-level smoothness along the sliding direction. Moreover, it is shown that the removal characteristics of the SiC substrate depend on process parameters such as the process time, rotation speed, contact load, and concentration of H$_{2}$O$_{2}$ solution. These results provide useful information for preparing an atomically smooth SiC surface.
Starting Page	159
Ending Page	163
Page Count	5
File Format	PDF
ISSN	03615235
Journal	Journal of Electronic Materials
Volume Number	38
Issue Number	1
e-ISSN	1543186X
Language	English
Publisher	Springer US
Publisher Date	2008-10-16
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Silicon carbide surface morphology polishing Solid State Physics and Spectroscopy Electronics and Microelectronics, Instrumentation Characterization and Evaluation of Materials Optical and Electronic Materials
Content Type	Text
Resource Type	Article
Subject	Materials Chemistry Electronic, Optical and Magnetic Materials Condensed Matter Physics Electrical and Electronic Engineering

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